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Scanning probe lithography: Application of organosilane self-assembled monolayers as ultra-thin resist films Hiroyuki Sugimura Department of Materials Science and Engineering, Kyoto University, Sakyo, Kyoto, Ja
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Document Date: 2014-05-27 00:18:05
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File Size: 3,32 MB
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Scanning probe lithography: Application of organosilane self-assembled monolayers as ultra-thin resist films Hiroyuki Sugimura Department of Materials Science and Engineering, Kyoto University, Sakyo, Kyoto, Ja