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Revision 1.1 XENON DIFLUORIDE ETCHING SYSTEM 1. Scope 1.1
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Document Date: 2015-05-06 04:34:51
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File Size: 861,45 KB
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Company
Shut /
/
IndustryTerm
gas phase etching system /
xenon difluoride gas /
/
Person
Tang /
Crystal Load /
/
SocialTag
Microtechnology
Fluid dynamics
Etching
Xenon difluoride
Pump
Chemistry
Semiconductor device fabrication
Materials science