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Date: 2011-02-17 10:25:06Microtechnology Materials science Polydimethylsiloxane Silicones Siloxanes Soft lithography Photoresist Nanoimprint lithography Photolithography Etching Photonic metamaterial | www.advmat.de COMMUNICATION www.MaterialsViews.comAdd to Reading ListSource URL: rogers.matse.illinois.eduDownload Document from Source WebsiteFile Size: 761,65 KBShare Document on Facebook |