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Chemistry / Microtechnology / Materials science / Engineering / Polymers / LIGA / Semiconductor device fabrication / Microelectromechanical systems / Photoresist / Photolithography / SU-8 photoresist / Poly


Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography V. Singh1, J. Goettert1, O. Jinka1,2,* 1 Center for Advanced Microstructures and Devices (CAMD)
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Document Date: 2012-07-31 11:19:10


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File Size: 1,32 MB

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