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Fabrication of Micrometer-Sized Conical Field Emitters Using Femtosecond Laser-Assisted Etching of Silicon J.E. CAREY*, C.H. CROUCH*, R. YOUNKIN**, E. MAZUR**, M. SHEEHY***, C.
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Document Date: 2010-10-12 16:26:08
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City
Cambridge /
Nordheim /
London /
/
Country
China /
/
Facility
Fudan University /
Harvard University /
/
IndustryTerm
intricate processing /
device applications /
/
Organization
Department of Physics /
National Science Foundation /
NDSEG /
Division of Engineering and Applied Sciences /
Fudan University /
Shanghai /
ARO /
Department of Chemistry and Chemical Biology /
Harvard University /
/
Technology
Laser /
photolithography /
/
SocialTag
Electrical engineering
Field electron emission
Light-emitting diode
Scanning electron microscope
Laser
Physics
Electromagnetism
Optics
Fabrication of Micrometer-Sized Conical Field Emitters Using Femtosecond Laser-Assisted Etching of Silicon J.E. CAREY*, C.H. CROUCH*, R. YOUNKIN**, E. MAZUR**, M. SHEEHY***, C.