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Mantel_Pi-Fab_Front_Aufzählungspunkte_2014-09-16
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Document Date: 2015-06-08 13:40:32

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File Size: 2,78 MB

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Company

D S Y S T E M S A / /

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Facility

Fraunhofer Institute / /

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IndustryTerm

thin-film electronics / particular processing steps / electron devices / extended sputtering tools / device processing / inorganic thin-film electronics / power devices / /

Organization

Fraunhofer Institute for Integrated Systems / /

Person

Anton Bauer / Volker Häublein / /

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Technology

lithography / MEMS / process control / 0.8 µm Si-CMOS technology / /

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