Abstract Submitted for the GEC09 Meeting of The American Physical Society Model and experimental evidence of heating of nanoparticles in low-pressure silane plasmas1 FEDERICO GALLI, UWE KORTSHAGEN, University of Minnesot

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Date: 2012-05-18 13:05:07		Abstract Submitted for the GEC09 Meeting of The American Physical Society Model and experimental evidence of heating of nanoparticles in low-pressure silane plasmas1 FEDERICO GALLI, UWE KORTSHAGEN, University of Minnesot Add to Reading List Source URL: absimage.aps.org Download Document from Source Website File Size: 27,79 KB Share Document on Facebook