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Proton beam writing a platform technology for high quality threedimensional metal mold fabrication for nanofluidic applications J. A. van Kan, P. G. Shao, Y. H. Wang & P. Malar
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Document Date: 2013-02-01 05:11:31
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File Size: 626,06 KB
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Proton beam writing a platform technology for high quality threedimensional metal mold fabrication for nanofluidic applications J. A. van Kan, P. G. Shao, Y. H. Wang & P. Malar