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| Document Date: 2009-03-25 10:37:12 Open Document File Size: 88,19 KBShare Result on Facebook
City France Germany The / / Company LITHOGRAPHY Partners / ASML / SAGEM / Esprit / CSC / / Continent Europe / / Country Japan / United States / / Currency EUR / / / / IndustryTerm tive coating technology / multilayer coating technology / masks alpha tool / alpha tool / nm chips / mask equipment / replacement technologies / system electronics / lithographic equipment / enhancement technologies / main candidate technology / high technology electronics / optical systems / exposure tool / chip manufacturing costs / / Organization Information Society / MEDEA+ Office / European Commission / / Person Hans Meiling / / / Position leader / Xenocs Project leader / illuminator / co-operative / optics specialist / / ProgrammingLanguage NGL / / PublishedMedium the Information Society / / SportsEvent EPL / / Technology semiconductor / alpha / replacement technologies / 70 nm chips / tive coating technology / photolithography / integrated circuits / multilayer coating technology / enhancement technologies / Integrated circuit / main candidate technology / NGL technologies / / URL http /
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