![Extreme ultraviolet / Ultraviolet / Next-generation lithography / Physics / Extreme ultraviolet lithography / Microtechnology / Photolithography Extreme ultraviolet / Ultraviolet / Next-generation lithography / Physics / Extreme ultraviolet lithography / Microtechnology / Photolithography](https://www.pdfsearch.io/img/f1cdf93eca5fee9e626066e8ab205049.jpg)
| Document Date: 2009-03-25 10:37:13 Open Document File Size: 88,80 KBShare Result on Facebook
City Stuttgart / France Germany The / / Company LITHOGRAPHY Partners / Alcatel / Infineon Technologies / Sagem / Philips / ESPRIT / / Continent Europe / / Country United States / / Currency EUR / / / / IndustryTerm consortium energy photons / electronics indus / final products / mask-making technology / technology roadmap / industrial solutions / transportation procedures / exposure tool / defect-free multilayer mirror blank processing / process meeting mask specifications tools / / Organization Information Society / MEDEA+ Office / European Commission / / / Position leader / conductor / Schott Glas Schott Lithotec SESO Sopra Uni Marseille Xenocs Project leader / co-operative / / PublishedMedium the Information Society / / Technology semiconductor / mask-making technology / Untried technologies / simulation / key enabling technology / integrated circuit / / URL http /
SocialTag |