| Document Date: 2009-03-25 10:37:13
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City Stuttgart / France Germany The / / Company LITHOGRAPHY Partners / Alcatel / Infineon Technologies / Sagem / Philips / ESPRIT / / Continent Europe / / Country United States / / Currency EUR / / / / IndustryTerm consortium energy photons / electronics indus / final products / mask-making technology / technology roadmap / industrial solutions / transportation procedures / exposure tool / defect-free multilayer mirror blank processing / process meeting mask specifications tools / / Organization Information Society / MEDEA+ Office / European Commission / / / Position leader / conductor / Schott Glas Schott Lithotec SESO Sopra Uni Marseille Xenocs Project leader / co-operative / / PublishedMedium the Information Society / / Technology semiconductor / mask-making technology / Untried technologies / simulation / key enabling technology / integrated circuit / / URL http /
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