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Microtechnology / Nanotechnology / Nanoelectromechanical system / Nanoelectronics / Microelectromechanical systems / University of Illinois at Urbana–Champaign / Beckman Institute / Micro-opto-mechanical systems / RF MEMS / Champaign County /  Illinois / Materials science / Illinois
Microtechnology
Nanotechnology
Nanoelectromechanical system
Nanoelectronics
Microelectromechanical systems
University of Illinois at Urbana–Champaign
Beckman Institute
Micro-opto-mechanical systems
RF MEMS
Champaign County
Illinois
Materials science
Illinois

PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof.  N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering

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