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	F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y 1 1 Add to Reading List Document Date: 2015-06-08 11:56:43 Open Document File Size: 582,52 KB Share Result on Facebook Company D S Y S T E M S A / Integrated Systems / / / Event Product Issues / / Facility Fraunhofer Institute / / / IndustryTerm power electronic devices / / Organization Fraunhofer Institute / / Person Adam Tokarski / / / Product gate structure / / Technology semiconductor / adam / mechanism Device Technology / THERMOGRAPHY / / URL www.iisb.fraunhofer.de / / SocialTag Carrier scattering Electron beam Electron beam induced current Semiconductor device fabrication

F R A U N H O F E R I N S T I T U T E F O R I N T E G R AT E D S Y S T E M S A N D D E V I C E T E C H N O L O G Y 1 1Add to Reading List