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Spectroscopy / Surface chemistry / Molecular physics / Atomic physics / X-ray photoelectron spectroscopy / Photoelectric effect / Oxide / Ultra-high vacuum / Chemistry / Physics / Physical chemistry


Photon Factory Activity Report 2004 #22 Part BSurface and Interface 11D/2004G291 XPS study of the initial oxidation stage on HF-treated Si(100) surfaces
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Document Date: 2010-01-05 10:31:21

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Engineering Yamagata University / Hirosaki University / /

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electron energy analyzer / photon energy / /

Organization

Hirosaki University / Faculty of Science and Technology / Engineering Yamagata University / Center for Interdisciplinary Research / Tohoku University / /

Technology

semiconductor / radiation / X-ray / /

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