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	Plasma CVD and ALD processes for non-volatile resistive memories and for selective deposition processes Pr. C. Vallée Université Grenoble Alpes, LTM/CNRS/UGA/CEA-LETI, 17 rue des Martyrs, FGrenoble Cedex FRANCE Add to Reading List Document Date: 2016-09-05 02:24:26 Open Document File Size: 42,11 KB Share Result on Facebook

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Plasma CVD and ALD processes for non-volatile resistive memories and for selective deposition processes Pr. C. Vallée Université Grenoble Alpes, LTM/CNRS/UGA/CEA-LETI, 17 rue des Martyrs, FGrenoble Cedex FRANCE Add to Reading List