Department of Mechanical Engineering presents “Nanoimprint Lithography is 20 Years Old: The Age of Maturity and Time to Move Forward” Dr. Christophe Peroz

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Date: 2014-10-30 14:05:13 Optics Nanolithography Semiconductor device fabrication Photonics Nanotechnology Molecular Foundry Lithography Multiple patterning Resist Technology Nanoimprint lithography Materials science		Department of Mechanical Engineering presents “Nanoimprint Lithography is 20 Years Old: The Age of Maturity and Time to Move Forward” Dr. Christophe Peroz Add to Reading List Source URL: me.berkeley.edu Download Document from Source Website File Size: 146,98 KB Share Document on Facebook

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