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Multiple patterning / Extreme ultraviolet / Next-generation lithography / Optical coating / Photolithography / Ultraviolet / 11 nanometer / Electromagnetic radiation / Materials science / Extreme ultraviolet lithography


SURFACE AND INTERFACE DYNAMICS IN MULTILAYERED SYSTEMS Ph.D. committee Chair: prof. dr. ir. B. Poelsema Secretary:
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Document Date: 2011-08-28 11:51:47


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File Size: 3,55 MB

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City

ICSFS / ICMCTF / PXRMS / Stralingstechnologie / /

Company

T. Tsarfati A.E. / I. Nedelcu A.E. / Nikon / ASML / Carl Zeiss SMT AG / E. Zoethout A. E. / Canon / E. Louis A.E. / Philips / /

Country

Germany / Netherlands / Bulgaria / United States / China / Ireland / /

Currency

EUR / /

Event

Business Partnership / Bankruptcy / /

Facility

University of Twente / Plasma Physics Rijnhuizen University of Twente / Plasma Physics Rijnhuizen FOM Institute / Nanotechnology FOM Institute / G. Rijnders University of Twente / Plasma Physics Rijnhuizen University of Salford Philips Research University / Nanotechnology University of Twente / Nanotechnology University of Leiden FOM Institute / TNW MESA+ Institute / TWN MESA+ Institute / /

IndustryTerm

demonstration tool / lithographic technologies / d-metal surfaces / nm technology node / technology transfers / transition metal nanolayers / printing / demonstration projection lithography tools / process development tool / demonstration tools / d-metal nanolayers / manufacturing / transition metal / protective d-metal nanolayers / /

Organization

Nanotechnology FOM Institute / AND INTERFACE DYNAMICS IN MULTILAYERED SYSTEMS Ph.D. committee / Plasma Physics Rijnhuizen University / University of Salford / TWN MESA+ Institute / Plasma Physics Rijnhuizen FOM Institute / Nanotechnology University of Leiden FOM Institute / TNW MESA+ Institute for Nanotechnology Cover / TNW MESA+ Institute / University of Twente / European Commission / /

Person

J. Cihelka / V / A. W. Kleyn / P. C. Zalm / B. Mertens / Ownership / W. E. van de Kruijs / S. Müllender / Tim Tsarfati / H. Brinksma / S. Alonso van der Westen / K. J. Boller / A. Yakshin / H. Enkisch / F. Bijkerk / B. Wolschrijn / Ion Scattering / /

Position

rector / Chair / Poelsema Secretary / Assistant / CoO / /

ProvinceOrState

Montana / California / /

Technology

semiconductor / radiation / x-ray / Coating technology / lithography / Photolithography / spectroscopy / two technologies / integrated circuit / /

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