PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering - Nanoelectromechanical systems - Document - PDFSEARCH.IO

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	PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering Add to Reading List Open Document File Size: 222,87 KB Share Result on Facebook

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PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering Add to Reading List