Nanoelectromechanical Systems / A. M. Padovani S. A. B. / Zhaoning Yu Nanostructure Laboratory / New Jersey 08544 Erli Chen NanoOpto Corp. / Micro/ Nano Total Analysis Systems / New Jersey 08544 Jian Wang Nanonex Corp. / Ge / Stephen Y. Chou Nanostructure Laboratory / /
Country
United States / /
Currency
USD / / /
Facility
Princeton University / American Institute of Physics Downloaded / American Institute of Physics / /
IndustryTerm
highdefinition charge-coupled-device / gas pressure / integrated nanoscale devices / e-beam / fabrication tools / fabrication technologies / using currently available fabrication technologies / /
Organization
National Institute of Health / American Institute of Physics / National Science Foundation / O. Tegenfeldt and Robert H. Austin Department of Physics / DARPA / Princeton University / /
Person
Lei Chen / A. M. Hawryluk / J. Melngailis / Peter R. Krauss / Robert H. Austin / L. Kong / Henry I. Smith / N. Tsumita / Preston J. Renstrom / A. Kohl / /
APPLIED PHYSICS LETTERS VOLUME 81, NUMBER 1 1 JULY 2002