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A facility within the Nanometer Structure Consortium (nmC) at Lund University lund
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Document Date: 2012-10-23 01:27:25
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File Size: 1,08 MB
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City
Nano /
Nanowire /
/
Company
Lg /
Oxford Instruments /
/
Facility
Lund University /
/
IndustryTerm
view equipment /
semi-automatic multilayer metal deposition /
electronics /
post-processing /
joint research infrastructure /
wafer processing /
manufacturing /
e-beam /
nano-devices /
power electronic devices /
device applications /
nanoelectronic devices /
e.g. lift-off applications /
low-energy plasma etching /
/
Organization
Lund Nano Lab /
Division of Solid State Physics /
Lund University /
/
Person
Georg Rydnemalm Sujeeka Lindborg Mariusz /
Peter Ramvall /
Ivan Maximov /
David Adolph /
Lena Timby /
Nova NanoLab /
Marcel van Helvoort /
Thomas Swan /
/
Technology
semiconductor /
Rapid Thermal Processing /
lithography /
lasers /
dielectric /
/
URL
http /
SocialTag
Thin film deposition
Technology
Nanoelectronics
Nanowire
Nanoimprint lithography
Epitaxy
Focused ion beam
Nanolithography
Vapor–liquid–solid method
Semiconductor device fabrication