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Technology / Etching / Microelectromechanical systems / Wafer / RF MEMS / Photoresist / Integrated circuit / Deep reactive-ion etching / Nanoimprint lithography / Materials science / Semiconductor device fabrication / Microtechnology


Document Date: 2012-04-17 15:04:17

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File Size: 1,51 MB

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City

Raton / San Francisco / Francisco / A MEMS / Duffy / /

Company

Perot / Dow Corning / IOP Publishing Ltd / Vertex / Nano-Chemical-ElectricalMechanical Manufacturing Systems / MicroChem Corp. / Silicon / CRC Press / /

Country

United States / /

Currency

USD / /

/

Facility

Masonry Dec / University of Illinois / /

IndustryTerm

manufacturing strategy / chemical sensors / printing / online journal / manufacturing throughput / transfer printing / chemical mechanical polishing / chemical derivatives / manufacturing route / manufacturing / transfer printing process / chemical / microscale manufacturing capabilities / /

Organization

Center for Nano-Chemical-ElectricalMechanical Manufacturing Systems / University of Illinois / National Science Foundation / Department of Mechanical Science and Engineering / Department of Materials Science and Engineering / Freemasonry / constructed using micro-masonry / /

Person

Addison Wesley / Andrew Carlson / Placid M. Ferreira / Nat / Agustin Mihi / William P. King / Jeffrey D Eisenhaure / Paul V Braun / John A Rogers / /

Position

King / /

ProvinceOrState

Illinois / /

Technology

microelectromechanical systems / MEMS / semiconductors / x-ray / chemical mechanical polishing / lithography / integrated circuit technology / integrated circuits / /

URL

http /

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