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Nanoimprint Lithography Objective Impact and Customers • The target for NIL patterning is expanding from semiconductor devices to a range of technologies where nanoscale patterning has yet to be realized, including da
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Document Date: 2012-10-02 09:36:55


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Company

Engineering Laboratory / Materials Science / /

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IndustryTerm

biological devices / lab-on-a-chip devices / logic devices / integrated circuit chips / optical devices / semiconductor devices / data storage media / /

Organization

Polymers Division / /

Person

Hyun Wook Ro / Christopher L. Soles / Brian Okerberg Kyle Alvine Yifu / Lee Richter / Jeong Lee Jing Zhou Brian Okerberg Kyle / Kyle Alvine Yifu Ding Lei / Ding Lei Chen / Thomas Germer / Heather Patrick / /

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Position

leader / /

ProgrammingLanguage

NIL / /

Technology

semiconductor / spectroscopy / lab-on-a-chip / Lithography / integrated circuit chips / semiconductors / X-ray / rapidly expanding technology / semiconductor devices / NIL technology / dielectric / /

URL

www.nist.gov/polymers / /

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