![](https://www.pdfsearch.io/img/0cf1eb5f7da8864871618955f532a0e0.jpg) Date: 2006-01-25 09:02:45
| | 3D tactile sensor for nanometrology E.J.C. Bos Eindhoven University of Technology, Department of Mechanical Engineering, Section Micro and Nanoscale Engineering, P.O. Box 513, NL 5600 MB Eindhoven phone +Add to Reading ListSource URL: www.em.tue.nlDownload Document from Source Website File Size: 179,66 KBShare Document on Facebook
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