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Nanotech
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#	Item
191	Deep Si Etching at the UCSB Nanofabrication Facility Silicon Deep RIE/ICP – Bosch Si- DRIE Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Technology Etching Deep reactive-ion etching Microelectromechanical systems Glass etching Sulfur hexafluoride 9W Microtechnology Materials science Semiconductor device fabrication
192	PDF Document Add to Reading List Source URL: www.nanotech.ucsb.edu - Date: 2013-01-06 22:10:48
193	PDF Document Add to Reading List Source URL: www.nanotech.ucsb.edu - Date: 2013-01-06 22:10:48
194	PDF Document Add to Reading List Source URL: www.nanotech.ucsb.edu - Date: 2013-01-06 22:10:48
195	W-TiW Etching at the UCSB Nanofabrication Facility Panasonic E640 ICP Etcher Panasonic E640 ICP Etcher • Multi-Purpose ICP etcher Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Technology Tiw Semiconductor device fabrication Microtechnology Etching
196	Microsoft Word - vh_mri_7000_en_05112204_ls.doc Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:48 Technology Nanoimprint lithography Polymer Spin coating Poly Resist Semiconductor device fabrication Materials science Optical materials
197	Template Financial Statement 1 Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:51 General ledger Expense
198	Nanotech news Spring Volume 3 Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:11:24 Nanotechnology Ion beam deposition Thin film Nanolithography Materials science Manufacturing Technology Thin film deposition University of California Santa Barbara Veeco
199	Si Etching with Chlorine at the UCSB Nanofabrication Facility Chlorine Etcher 2– Parallel Plate RIE #5 Plamsa Therm 770 SLR system Add to Reading List Source URL: www.nanotech.ucsb.edu Language: English - Date: 2013-01-06 22:10:49 Semiconductor device fabrication Chemical elements Microtechnology Etching CL2 Chlorine Silicon dioxide Silicon Chemistry Matter Materials science
200	PDF Document Add to Reading List Source URL: www.nanotech.ucsb.edu - Date: 2013-01-06 22:10:48

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