metal / thermal processing steps / carrier mobilities / technology processes / in-line processing experiments / Metal line resistance / well established technology / device simulation tools / gas mixture / manufacturing / process simulation tool / carrier generation / e.g. metal wrap-through / done using in-line processing experiments / /
Organization
New and Renewable Energy Centre / Nick E.B. Cowern* School of Electrical / Electronic and Computer Engineering / European Union / Merz Court / University of Newcastle / /
Person
Keith C. Heasman / Nick E.B. Cowern / Laura Brown / Kristine Drew / S.E. Garrett / Alex Cole / /