The University of Tokyo / Shanghai Institute of Microsystem / Kyushu University / Korea Institute of Industrial Technology / / /
Organization
Korea Institute of Industrial Technology / University of Tokyo / Shanghai Institute of Microsystem and Information Technology / Kyushu University / Conference Secretariat / /
Person
Renshi Sawada / Nak-Kyu Lee / Xinxin Li / Eiji Higurashi / / /
Technology
MEMS / Information Technology / MEMS/NEMS technology / /