Journal of Undergraduate Research 2, Atomic Layer Deposition of Hafnium Oxide on Silicon and Polymer Fibers at Temperatures below 100◦ C K.C. Kragh Department of Physics and Optical Engineering, Rose-Hulman I

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Date: 2008-12-16 00:42:06		Journal of Undergraduate Research 2, Atomic Layer Deposition of Hafnium Oxide on Silicon and Polymer Fibers at Temperatures below 100◦ C K.C. Kragh Department of Physics and Optical Engineering, Rose-Hulman I Add to Reading List Source URL: jur.phy.uic.edu Download Document from Source Website File Size: 1,07 MB Share Document on Facebook