Lithographic Systems / Hewlett Packard / Applied Optics Group / /
Facility
National University of Ireland Galway September / /
IndustryTerm
lithography systems / wafer-stepper systems / non-imaging beam homogenization system / /
Organization
National University of Ireland Galway / Irish Research Council for Science / Engineering and Technology / School of Physics / Science Foundation Ireland / /
Person
Catherine / Chris Dainty / Kevin Conlisk / Elizabeth / Conor McBrierty / Pauline / Elaine / Connell Conlisk / Caroline / Tess / Anna Burvall / /
Numerical Modelling and Measurement of Spatial Coherence in a Lithographic System by Arlene Smith Supervisor: Prof. Chris Dainty