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Optical proximity correction / Linear regression / Gauss–Markov theorem / Convex function / Errors and residuals in statistics / Dummy variable / Statistics / Regression analysis / Econometrics


C:/Documents and Settings/allan gu/Desktop/ieee-semicon_linear_regression_opc/ieee-semicon_linear_regression_opc/ieee_tran_semicon_manu.dvi
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Document Date: 2007-12-04 16:16:45

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File Size: 1,73 MB

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Company

Mentor Graphics / Computer Sciences / /

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Facility

Computer Sciences University of California at Berkeley / /

IndustryTerm

neural networks / hybrid solution / lithography systems / manufacturing / neural network / linear regression solution / /

Organization

University of California / yˆ / OPC / /

Person

Pixel / Allan Gu / Avideh Zakhor / /

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Position

lithography engineer / linear regression model at predicting the fragment movement / /

Technology

3 OPC algorithm / lithography / lithography system / neural network / OPC algorithms / Integrated Circuit / /

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