![Semiconductor device fabrication / Silicones / PDMS stamp / Nanoimprint lithography / Ultraviolet / Wafer / Etching / Gallium nitride / Polydimethylsiloxane / Chemistry / Materials science / Microtechnology Semiconductor device fabrication / Silicones / PDMS stamp / Nanoimprint lithography / Ultraviolet / Wafer / Etching / Gallium nitride / Polydimethylsiloxane / Chemistry / Materials science / Microtechnology](https://www.pdfsearch.io/img/1e1d1d4154801f8adce54611252fcdca.jpg)
| Document Date: 2015-06-09 14:26:46 Open Document File Size: 899,92 KBShare Result on Facebook
Company D S Y S T E M S A / / / / IndustryTerm quartz carrier plate / carrier plate / manufacturing / µm quartz carrier plate / e-beam / lithography technologies / / Organization SERVICES AND SOLUTIONS FOR LARGE AREA NANOIMPRINT TECHNOLOGY CONTACT Fraunhofer Institute for Integrated Systems / / Person Mathias Rommel / / / Technology lithography / lithography technologies / / URL www.iisb.fraunhofer.de / /
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