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Date: 2014-01-15 15:31:22Chemistry Sputtering Thin film deposition Argon Matter Technology Sputter deposition Semiconductor device fabrication Materials science Coatings | Optimizing Sputtering Parameters to Minimize Roughness in Permalloy Thin FilmsAdd to Reading ListSource URL: www.ncnr.nist.govDownload Document from Source WebsiteFile Size: 1,28 MBShare Document on Facebook |