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![]() | Document Date: 2010-01-26 10:41:37Open Document File Size: 1,00 MBShare Result on FacebookCityLondon / Boston / /CompanyDOD/Army Research Laboratory / /CountryUnited States / /CurrencyUSD / / /FacilityBoston College / Boston University / Photonics Center / CST MICROWAVE STUDIO / performed using CST MICROWAVE STUDIO / /IndustryTermsurface micromachining technology / Potential applications / functional devices / /OrganizationAmerican Physical Society / African Union / National Science Foundation / PHYSICAL REVIEW LETTERS mission / Boston College / Department of Defense / Boston University / Department of Physics / Photonics Center / Department of Mechanical Engineering / /PersonNat / /ProgrammingLanguageC / /ProvinceOrStateMassachusetts / /PublishedMediumPHYSICAL REVIEW LETTERS / /Technologyradiation / broadband / MEMS / spectroscopy / microwave / using surface micromachining technology / simulation / /URLhttp /SocialTag |