INTRODUCTION MicroElectroMechanical Systems / CH Electronics Inc. / U.C. Berkeley's Microfabrication Laboratory / /
Country
Japan / / /
Facility
Technology Akita Prefectural University / Case Western Reserve University / Dorian Liepmann University of California at Berkeley Berkeley / / /
IndustryTerm
optical communication systems / gas phase combustion / potential applications / obvious solution / infrared imaging / energy densities / energy density / manufacturing techniques / exhaust gas / manufacturing / valve timing systems / Early products / manufacturing tolerance / thermal management / thermal devices / steel shaft / combustion systems / steel / energy / micro-fluidic systems / gas recirculation / using the manufacturing techniques / /
Organization
Congress / CWRU SiC / MEMS Research Center / University of California / Systems Science and Technology Akita Prefectural University / Machine Intelligence / Systems Engineering Faculty of Systems Science / Case Western Reserve University / Kenji Miyaska Department of Technology Fukui University Fukui / Japan Kaoru Maruta Department / /
Person
Otto Cycle / David C. Walther / Aaron J. Knobloch / Kenji Miyaska / Fabian C. Martinez / Carlos Fernandez-Pello / / /
Product
Si / Tc / /
ProgrammingLanguage
DC / /
ProvinceOrState
New York / /
Technology
MicroElectroMechanical Systems / THERMODYNAMICS / integrated chip / lithography / MEMS system / integrated circuit / /
Design and Experimental Results of Small-Scale Rotary Engines