Scale bar / American Institute of Physics Downloaded / American Institute of Physics / University of Toronto / /
IndustryTerm
pulse energy / potential devices / selective chemical etching / oil immersion objective / room temperature chemical vapor deposition / /
Organization
American Institute of Physics Downloaded / American Institute of Physics / Germany Martin Wegener Institut für Angewandte Physik / Institut für Nanotechnologie / Universität Karlsruhe / Natural Sciences and Engineering Research Council of Canada / D-76131 Karlsruhe / Germany Artan Kaso and Sajeev John Department of Physics / Center for Functional Nanostructures / University of Toronto / /
Person
Nat / Martin Wegener / /
ProvinceOrState
Ontario / /
Technology
spectroscopy / laser / CVD / polymerization / dielectric / chemical vapor deposition / laser system / /
APPLIED PHYSICS LETTERS VOLUME 85, NUMBER[removed]SEPTEMBER 2004