chamber cleaning solution / gas flow / reactive gas precursor stream / stainless steel / thinfilm processing equipment / conventional in-situ plasma systems / gas velocity / remote plasma technology / high gas velocities / feed gas / reactive gas stream / precursor gas / reactive precursor gas / aqueous hydrofluoric acid solution / plasma deposition tools / plasma-assisted cleaning systems / solar photovoltaic manufacturing processes / gas flows / induction law / chemical vapor deposition / plasma source technology / source gas / high gas flow rates / plasma process deposition tools / manufacturing / large scale processing / chamber cleaning applications / gas transport lines / potent greenhouse gas / wetted metal surfaces / process tools / chamber clean applications / /