Plasma Source Atom Source, Ion Source and Atom Ion Hybrid Source The tectra Plasma Source* is a multi-purpose source which can easily be user configured to produce either atoms or ions and finds uses in a wide range of H - Plasma source - Document - PDFSEARCH.IO

First Page	Meta Content
	Plasma Source Atom Source, Ion Source and Atom/Ion Hybrid Source The tectra Plasma Source* is a multi-purpose source which can easily be user configured to produce either atoms or ions and finds uses in a wide range of H Add to Reading List Document Date: 2003-12-07 12:39:31 Open Document File Size: 268,38 KB Share Result on Facebook Company tectra GmbH / Thin Solid Films / Angewandte Physik tectra GmbH / / / Facility University of Hamburg / / / IndustryTerm metal / beam energy / microwave energy / low kinetic energy / gas flow / thin film processing / gas load / higher kinetic energy / controllable energy / energy range / steel / energy / / Organization University of Hamburg / / Person Ion Assisted / J. Offermann / R. Anton / A. A. Schmidt / Ion Source / / / Position General / / Technology microwave / dielectric / / URL www.tectra.de / / SocialTag Ions Thin film deposition Plasma processing Matter Plasma physics Sputter deposition Ion source Plasma Ion beam Chemistry

Plasma Source Atom Source, Ion Source and Atom/Ion Hybrid Source The tectra Plasma Source* is a multi-purpose source which can easily be user configured to produce either atoms or ions and finds uses in a wide range of HAdd to Reading List