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![]() | Document Date: 2002-08-19 17:38:22Open Document File Size: 807,37 KBShare Result on FacebookCityDresden / /Currencypence / / /FacilitySubroto Mukherjee* Institute of Ion Beam Physics / /IndustryTermapproximate analytical solution / low-energy extrapolation31 / surface binding energy / Long time solutions / plasma processing / high-energy species / sufficient recoil energy / electronic energy loss results / energy distribution results / kinetic energy / high ion energy / approximate solution / electronic energy loss / minimum threshold energy / ion energy distribution / chemical vapour deposition / electronics / mechanical applications / deposited energy distributions / high energy / low-energy extrapolation / free electron gas / energy deposition distributions / filtered cathodic arc device / mean energy results / simultaneous energy loss / chemical reaction / low-energy / lower energy / long processing times / energy spectrum / physical and chemical effects / possible applications / energy distribution / ion energy / average energy loss / actual and potential applications / numerical solution / energy / steel / /MusicAlbumSide / /OrganizationInstitute for Plasma Research / Subroto Mukherjee* Institute of Ion Beam Physics and Materials Research / Germany *Facilitation Centre for Industrial Plasma Technologies / /PersonIon Beam / /PositionRt / /Technologyradiation / laser / sublimation / semiconductors / simulation / /SocialTag |