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Chemistry / Materials science / Thin film deposition / Thin films / Plasma-immersion ion implantation / Plasma / Ion implantation / Debye sheath / Langmuir probe / Physics / Semiconductor device fabrication / Plasma physics
Date: 2002-08-19 17:38:22
Chemistry
Materials science
Thin film deposition
Thin films
Plasma-immersion ion implantation
Plasma
Ion implantation
Debye sheath
Langmuir probe
Physics
Semiconductor device fabrication
Plasma physics

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