metal film / optical and mechanical systems / typical single lithography tool / throughput nanofabrication technologies / pattern data management / nanoscale device / manufacturing technology / electronics / nanoscale devices / ion-beam technology / manufacturing / real-world nanomanufacturing applications / optical energy / optical imaging / metal surface / imaging / /
Organization
DAVID B. BOGY AND XIANG ZHANG* Department of Mechanical Engineering / University of California / Berkeley / NSF Centre for Scalable and Integrated NanoManufacturing / /
Person
YUAN WANG / XIANG ZHANG / LIANG PAN / DAVID B. BOGY / Photoresist Rotating / CHENG SUN / /
Position
Author / magnetic recording head / Author information Reprints / plasmonic flying head / flying head / fabricated plasmonic flying head / plasmonic head / /
ProvinceOrState
California / /
Technology
high-throughput nanofabrication technologies / semiconductor / Laser / ion-beam technology / process control system / SPL technology / ATM / lithography / simulation / Process control / manufacturing technology / /
LETTERS Flying plasmonic lens in the near field for