First Page | Meta Content | |
---|---|---|
Document Date: 2013-04-29 02:54:51Open Document File Size: 152,36 KBShare Result on FacebookCityHannover / Reliability / Aschaffenburg / /CompanyMicro-Electro-Mechanical Systems / Shuttle Width Ws (µm) Cantilevers Length Lc / Compliant Micro-Electro-Mechanical Systems / /CountryGermany / / /FacilityInstitute of Electro-Mechanical / /IndustryTermsurgical devices / robustness design tool / micro electromechanical systems / post-processing / technology steps / manufacturing inaccuracy / neural network / navigation applications / manufacturing tolerances / mass manufacturing process / telecommunications / microelectro-mechanical systems / stored linear solution / /OrganizationInstitute of Electro-Mechanical and Electronic Design / /PersonAlfred Kamusella / Holger Neubert / Quan Pham / /PositionCOMSOL Multiphysics model / which computes the first resonance frequency / TU Dresden *Corresponding author / designer / /PublishedMediumProceedings of SPIE / /Technologybiosensors / simulation / neural network / ASCII / PDF / /URLwww.optiy.de / /SocialTag |