| Document Date: 2014-05-02 03:25:26
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Company Denton Vacuum LLC / / Country United States / / Currency STD / / IndustryTerm carrier gas / compliant systems / control system software / cluster tool / / Person Denton Vacuum / / Position MKS mass flow controller for carrier gas / / ProvinceOrState New Jersey / / Technology process control / / URL www.dentonvacuum.com / / |
Exilis 1 Atomic Layer Deposition System Breakthrough ALD capability, productivity and reliability. Development scale atomic layer deposition. Process