| Document Date: 2014-07-03 02:40:24
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City Moscow Technopolis / Moscow / / Company Canon / CEA-Leti Microelectronics Research Institute / Lam Research / Nikon / ASML / RUSNANO Management Company LLC / Russian Nanotechnologies Corporation / TSMC / Mapper Lithography / / Country Russia / Netherlands / / Currency USD / RUB / / Event Reorganization / / Facility Lithography Equipment A plant / Moscow plant / Mapper’s Russian plant / CEA-Leti Microelectronics Research Institute / Mapper plant / Moscow Technopolis-based facility / / IndustryTerm lithography technology / device manufacturing / high-tech projects / biotechnology / semiconductor devices / maskless electron-beam technology / telecommunications / lithography using beam technology / metal goods / microelectronics manufacturing process / nanotechnology infrastructure / electronics / microelectromechanical systems / chip-based products / tech production equipment / healthcare / chemicals / / Organization Russian government / Foundation for Infrastructure and Educational Programs / CEA-Leti Microelectronics Research Institute in France / / Person Sergei Sobyanin / Arthur del Prado / Anatoly Chubais / Denis Shamiryan / / Position Mayor / Executive Chairman / co-founder / technical director / / Technology microelectromechanical systems / MEMS / maskless electron-beam technology / Maskless lithography using beam technology / biotechnology / semiconductor devices / optoelectronics / Lithography / lithography technology / /
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PRESS-RELEASE[removed]Mapper Lithography, a Portfolio Company of RUSNANO, Starts Production of Key Elements for a New Generation of Lithography Equipment A plant for the production of electronic optical elements usin