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Towards the single pump solution: Recent development in high speed machines for dry vacuum pumping A. D. Chew,a͒ M. Galtry, R. G. Livesey, and I. Stones
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Document Date: 2009-05-27 18:14:36

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File Size: 811,30 KB

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Company

BOC / Wilson / Knudsen / /

Country

United Kingdom / /

Currency

USD / /

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Facility

Institute of Refrigeration / /

IndustryTerm

laboratory applications / nonreactive gas duty applications / compact device / technology innovations / chemical process industries / pump solution / gas transport / circumferential gas rotation / gas module / harsh duty applications / /

NaturalFeature

Holweck channel / /

Organization

Institute of Refrigeration / American Vacuum Society / /

Position

Author / inverter driver / /

ProvinceOrState

New Brunswick / Sussex / /

Technology

semiconductor / laser / /

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