Contribution for Quantsol 2011 Winter Workshop Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures Bert Stegemann1, Thomas Lussky2, Andreas Schöpk - Quantum evolution - Document - PDFSEARCH.IO

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	Contribution for Quantsol 2011 Winter Workshop Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures Bert Stegemann1, Thomas Lussky2, Andreas Schöpk Add to Reading List Document Date: 2011-03-17 17:06:50 Open Document File Size: 975,29 KB Share Result on Facebook City Prague / Berlin / / Country Germany / Czech Republic / / Currency pence / / Facility University of Applied Sciences Berlin / Germany Helmholtz Center / Institute of Physics / / Organization Institute of Physics / Germany Helmholtz Center Berlin / University of Applied Sciences Berlin / Academy of Sciences of the Czech Republic / / Person B. Rezek / V / / Technology spectroscopy / / SocialTag Semiconductor devices Emerging technologies Quantum electronics Scanning probe microscopy Intermolecular forces Atomic force microscopy Silicon dioxide Quantum dot Annealing Chemistry

Contribution for Quantsol 2011 Winter Workshop Correlation between conductivity and structural evolution of Si-rich silicon oxide films annealed at different temperatures Bert Stegemann1, Thomas Lussky2, Andreas SchöpkAdd to Reading List