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United States / /
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USD / / /
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Product Issues / /
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UCSB Nanofabrication Facility / NanoStructures Cleanroom Facility / University of California / /
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qubit lift-off processing / chemical cleaning / chemical contamination / lift-off metal / metal type / lift-off processing / base metal deposition / similar28 processing / electron energy loss spectroscopy / resonator chip / imaging / energy relaxation / metal / post-processing studies / interface processing / careful post-processing techniques / e-beam / post-processing residue / post-processing devices / excess metal / /
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National Science Foundation / U.S. Government / University of California / Santa Barbara / University of California / Berkeley / National Intelligence / Department of Physics / /
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A. N. Cleland / T. C. White / M. B. Rothwell / A. Vainsencher / D. H. Slichter / D. I. Schuster / J. Wenner / Nat / L. Frunzio / J. Gao / M. R. Vissers / S. Shankar / M. B. Ketchen / D. P. Pappas / S. M. Girvin / J. S. Kline / S. Girvin / K. Geerlings / J. Majer / J. M. Chow / J. R. Rozen / M. Steffen / G. A. Keefe / A. Blais / R. J. Schoelkopf / D. Sank / E. Edwards / John M. Martinisa / J. M. Gambetta / D. S. Wisbey / M. H. Devoret / M. Beth Rothwell / G. Kirchmair / /
APPLIED PHYSICS LETTERS 105, [removed]Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits C. M. Quintana, A. Megrant, Z. Chen, A. Dunsworth, B. Chiaro, R. Bare