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Supplementary Material for “Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits” C. M. Quintana,1 A. Megrant,1 Z. Chen,1 A. Dunsworth,1 B. Chiaro,1 R. Barends,1
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Document Date: 2014-08-14 14:18:10
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File Size: 200,09 KB
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Country
United States /
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Facility
University of California /
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IndustryTerm
etched metal /
metal /
beam energy /
chemical cleaning /
e-beam /
stored inductive energy /
electric energy filling factor /
lift-off metal sidewall /
excess metal /
/
Organization
Department of Physics /
University of California /
Santa Barbara /
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Position
JEOL JBX-6300FS electron beam writer /
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ProvinceOrState
California /
/
Technology
resist-coated chip /
lithography /
dielectric /
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SocialTag
Semiconductor device fabrication
Science
Thin film deposition
Physics
Electromagnetism
Electron beam lithography
Focused ion beam
Resonator
Electron microscope
Materials science