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Semiconductor device fabrication / Analog circuits / Plasma processing / Electronic filter topology / Microtechnology / Reactive-ion etching / Crystal oscillator / Etching / Plasma etching / RLC circuit / Plasma / Q factor


A Demonstration of Broadband RF Sensing: Empirical Polysilicon Etch Rate Estimation in a Lam 9400 Etch Tool Craig Garvin and J. W. Grizzle Department of Electrical Engineering and Computer Science, University of Michigan
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Document Date: 2016-04-25 13:15:11


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File Size: 137,76 KB

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