PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering - RF MEMS - Document - PDFSEARCH.IO

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Microtechnology Nanotechnology Nanoelectromechanical system Nanoelectronics Microelectromechanical systems University of Illinois at Urbana–Champaign Beckman Institute Micro-opto-mechanical systems RF MEMS Champaign County Illinois Materials science Illinois		PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering Add to Reading List Source URL: www.purdue.edu Download Document from Source Website File Size: 222,87 KB Share Document on Facebook

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