<--- Back to Details
First PageDocument Content
Electronics / Technology CAD / Rapid thermal processing / Epitaxy / Simulation / Computer simulation / Bipolar junction transistor / Ion implantation / Doping / Semiconductor device fabrication / Electronic design automation / Electronic engineering
Date: 2003-10-15 12:53:05
Electronics
Technology CAD
Rapid thermal processing
Epitaxy
Simulation
Computer simulation
Bipolar junction transistor
Ion implantation
Doping
Semiconductor device fabrication
Electronic design automation
Electronic engineering

Towards Predictable TCAD Wolfgang Fichtner Integrated Systems Laboratory Swiss Federal Institute of Technology, [removed] CH-8092 Zurich, Switzerland, ISE Integrated Systems Engineering AG, [removed]

Add to Reading List

Source URL: www.nsti.org

Download Document from Source Website

File Size: 935,53 KB

Share Document on Facebook

Similar Documents

OEM Group Receives Repeat Order For AGHeatpulse® RTP System From Leading LED Manufacturer Single wafer tool will be used for Rapid Thermal Processing of GaN-on-sapphire LED manufacturing in rapidly growing 150mm substra

DocID: 1nIKn - View Document

Matter / Energy conversion / Crystals / Energy harvesting / Solar cell / Passivation / Thin film solar cell / Polycrystalline silicon / Rapid thermal processing / Semiconductor device fabrication / Technology / Energy

Microsoft Word - pv150003.docx

DocID: 1aemV - View Document

Thermodynamics / Mechanical engineering / Electromagnetic radiation / Heat conduction / State functions / Thermal radiation / Rapid thermal processing / Stefan–Boltzmann law / Radiosity / Heat transfer / Chemistry / Physics

Mathematics-in-Industry Case Studies Journal, Volume 3, ppA Radiation Model of a Rapid Thermal Processing System Abigail Wacher Abstract.

DocID: 19fLC - View Document

Semiconductor fabrication plant / Nanoelectronics / Hong Kong University of Science and Technology / Technology / Materials science / Water / Semiconductor device fabrication / Rapid thermal processing / Valve

Standard Operating Manual

DocID: 18S3r - View Document

Annealing / Susceptor / Materials science / Manufacturing / Thin film deposition / Semiconductor device fabrication / Technology / Rapid thermal processing

Rapid Thermal Processing System Features:  Desk-Top design

DocID: 17zZP - View Document