![Chemistry / Technology / Plasma processing / Coatings / Vacuum / Chemical vapor deposition / Thin film / Plasma-enhanced chemical vapor deposition / Nanolithography / Semiconductor device fabrication / Thin film deposition / Materials science Chemistry / Technology / Plasma processing / Coatings / Vacuum / Chemical vapor deposition / Thin film / Plasma-enhanced chemical vapor deposition / Nanolithography / Semiconductor device fabrication / Thin film deposition / Materials science](https://www.pdfsearch.io/img/365a30788c0d7d0b63b73fcdd26bc085.jpg)
| Document Date: 2003-07-23 13:19:47 Open Document File Size: 4,22 MBShare Result on Facebook
Facility University of California Los Angeles / / IndustryTerm e-beam / metal oxide superlattices / / Organization Nanoscale Assembly of Novel Catalysts Robert F. Hicks Chemical Engineering Dept. / University of California Los Angeles / / Person Robert F. Hicks / / ProvinceOrState California / / Technology CVD / Lithography / Chemical vapor deposition / /
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