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R. Glöß Physik Instrumente (PI) GmbH & Co. KG Abstract: Nanotechnology requires extreme high resolution and accuracy and at the same time long travel range. Improvement in accuracy can be achieved with mechatronic desi
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Document Date: 2006-07-10 21:36:41
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R. Glöß Physik Instrumente (PI) GmbH & Co. KG Abstract: Nanotechnology requires extreme high resolution and accuracy and at the same time long travel range. Improvement in accuracy can be achieved with mechatronic desi